Relay-Version: version B 2.10 5/3/83; site utzoo.UUCP
Path: utzoo!linus!decvax!tektronix!uw-beaver!ubc-visi!sfucmpt!slawson
From: slawson@sfucmpt (Fred Slawson)
Newsgroups: net.lsi
Subject: E-Beam Mask Making
Message-ID: <156@sfucmpt.UUCP>
Date: Tue, 27-Sep-83 16:08:49 EDT
Article-I.D.: sfucmpt.156
Posted: Tue Sep 27 16:08:49 1983
Date-Received: Wed, 28-Sep-83 21:51:12 EDT
Lines: 7

Is anyone out there working on the production of pattern generation tapes
for electron-beam mask-writing machines?  Or do you know anyone who is?
Specifically I am interested in two areas of research:
1) development of improved algorithms for fracturing general
   polygons into e-beam machine quadrilaterals, and
2) optimization of e-beam machine control (sequencing of pattern
   rasterization versus stage movement).