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From: sgcpal@watdcsu.UUCP (P.A.ul Layman [EE-Device Physics])
Newsgroups: net.lsi,net.research
Subject: Public domain 2D process simulator.
Message-ID: <2574@watdcsu.UUCP>
Date: Tue, 23-Sep-86 13:39:56 EDT
Article-I.D.: watdcsu.2574
Posted: Tue Sep 23 13:39:56 1986
Date-Received: Thu, 25-Sep-86 08:07:41 EDT
Distribution: na
Organization: U of Waterloo, Ontario
Lines: 16
Xref: mnetor net.lsi:100 net.research:422

As part of my Ph.D. research, I am implementing a 2D device simulator.
I would like to perform the simulations on realistic device geometries
and profiles, and a process simulator would be of great value.
I already have a copy of SUPREM, so it it is really the second
dimension that I am interested in.

Any suggestions?

Thank's in advance,

Paul A. Layman

University of Waterloo, Electrical Engineering,
Silicon Devices and Integrated Circuits Research Group (SiDIC)

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